張傳維
  •        姓名:張傳維

           電話:027-87558045

           職稱:副教授

           郵箱:chuanweizhang@hust.edu.cn

個人基本情況

    張傳維(Zhang Chuanwei,Associate Professor,男广东11选5开奖结果,1982年出生,博士,華中科技大學機械學院副教授,主要從事納米制造中關鍵尺寸广东11选5开奖结果、3D形貌广东11选5开奖结果、以及套刻精度等參數光學測量方面的研究工作广东11选5开奖结果。作為主要研究人員,先后參加了國家863項目“高深寬比微納深溝槽結構基于模型的紅外反射譜測量方法與設備”广东11选5开奖结果、國家科技重大專項子課題“基于模型的光學臨近校正技術”以及國家自然科學基金重大研究計劃項目“基于廣義橢偏儀的納米結構三維形貌參數測量理論與方法研究”、國家重大科學儀器開發專項“寬光譜廣義橢偏儀設備開發”等多項國家級科研課題。主持完成一項國家自然科學基金青年基金項目“基于紅外橢偏光譜的高深寬比深溝槽結構側壁形貌參數測量方法研究”。申請國家發明專利16項,發表學術論文20余篇。

主要研究方向

納米光學測量

開設課程

工程測試技術

軟件技術基礎

機械電子系統分析與設計

近年的科研項目、專著與論文广东11选5开奖结果、專利、獲獎

承擔的科研項目:

1. 片上型光譜橢偏儀關鍵技術研究,華中科技大學自主創新基金,在研

2. 基于紅外橢偏光譜的高深寬比深溝槽結構側壁形貌參數測量方法研究,國家自然科學基金,結題


榮譽與獎項:

2013年獲華中科技大學教學競賽二等獎

2014年獲華中科技大學教學競賽一等獎


代表性著作:

[1] Xu S, Zhang CW, Wei HQ, and Liu SY, A single-image method of aberration retrieval for imaging systems under partially coherent illumination, J. Opt. 16(7), 072001 ,2014.

[2] 陳修國, 劉世元, 張傳維等,基于Mueller 矩陣橢偏儀的納米壓印模板與光刻膠光柵結構準確測量, 物理學報, 63(18): 180701, 2014.

[3]    Chen XG, Zhang CW, Liu SY, Depolarization effects from nanoimprinted grating structures as measured by Mueller matrix polarimetry. APPLIED PHYSICS LETTERS, 103(15): 151605, 2013.

[4]    Zhang CW, Liu SY, Shi TL, Tang ZR, Fitting-determined formulation of effective mediumapproximation for 3D trench structures in model-based infrared reflectrometry, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A, 28(2): 263-271, 2011

[5]    Zhang CW, Liu SY, Shi TL, Tang ZR, Improved model-based infrared reflectrometry for measuring deep trench structures, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A, 26(11): 2327-2335, 2009

[6]    Chen XG, Liu SY, Zhang CW, Jiang H, Improved measurement accuracy in optical scatterometry using correction-based library search. APPLIED OPTICS, 52(27): 6727-6734, 2013.

[7]    Chen XG, Liu SY, Zhang CW, Jiang H, Measurement configuration optimization for accurate grating reconstruction by Mueller matrix polarimetry. JOURNAL OF MICRO/NANOLITTHGRAPHY, MEMS, AND MOEMS, 12(3): 033013, 2013.

[8]    Chen XG, Liu SY, Zhang CW, Zhu JL, Improved measurement accuracy in optical scatterometry using fitting error interpolation based library search, MEASUREMET, 46(8): 2638-2646, 2013.

[9]    Zhu JL, Liu SY, Zhang CW, Chen XG, Dong ZQ, Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method, JOURNAL OF MICRO/NANOLITHOGRAPHY, MEMS, AND MOEMS, 12(1): 013004, 2013

[10]  Liu SY, Ma Y, Chen XG, Zhang CW, Estimation of the convergence order of rigorous coupled-wave analysis for binary gratings in optical critical dimension metrology, OPTICAL ENGINEERING, 51(8): 081504, 2012

[11]  Liu W, Liu SY, Wu XF, Zhang CW, Parametric analytical model for off-axis illumination sources based on Sigmoid function, ACTA PHYSICA SINICA, 60(5): 054213, 2011

[12]Liu SY, Zhang CW, Shen HW, Gu HY, Model-based FTIR reflectometry measurement system for deep trench structures of DRAM, SPECTROSCOPY AND SPECTRAL ANALYSIS, 29(4): 935-939, 2009

[13]  Liu SY, Gu HY, Zhang CW, Shen HW, A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximation, ACTA PHYSICA SINICA, 57(9): 5996-6001, 2008


广东11选5开奖结果
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